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Quality Commitment

As one of the largest back-end toll processing company in Korea.

Environment Control

Key control item Control limit Frequency Response
Particle 10 Zone Below 10 (0.3㎛) 1x / Week QA
100 Zone Below 100 (0.3㎛)
500 Zone Below 500 (0.3㎛)
Temperature 24 ± 4 ℃ 3x / Day QA
Humidity 50 ± 10 %
De-ionized water Resistivity Source - Above 17MΩ 1x / Month QA
Return - Above 16MΩ
TOC Below 150ppb 1x / Quarter QA
Bacteria Below 5 points 1x / Month QA
Intensity of illumination Above 400 Lux 1x / Quarter Maintenance

Clean Room Entry Procedure

퓨렉스는 Clean Room의 환경관리를 위해 철저한 입실관리 절차를 준수합니다.

  1. 1step

    Air shower booth

    Smock Room입실전 Air shower실시

  2. 2step

    Smock change room.

    Clean room 의류 및 부자재는 주기적인 세탁 및 이물측정 실시.

  3. 3step

    Hand washing with DI water

    Clean room 입실 전 DI Water를 이용한 손세척.

  4. 4step

    ESD Protection

    ESD Gate 를 이용해 최종 ESD 점검 완료 후 입실 가능.

Temperature and Humidity

Temperature
Cotroll Limit : 23±4˚C
Shut Down Limit : ±4˚C
Humidity
Cotroll Limit : 50±8 %
Shut Down Limit : ±10 %

온/습도계로 측정된 값은 실시간으로 중앙통제실로 자동 전달되며, 1HR 간격으로 관측하여 일일보고서로 기록됩니다.

Particle

Clean Room Class Control Particle Size Cotroll Limit Shut Down Limit
10 Class 0.3 um < 8 > 10
100 Class 0.5 um < 80 > 100
500 Class 0.5 um < 400 > 500

* Particle counter를 이용하여 Clean room의 Paticle을 측정합니다. (10 class_Daily /100,500 class_Weekly)

ESD Control

Item Control Limit
Floor Ground < 10^9Ω
Ionizer Decay time < 10 sec
Ion balance < 35 V
Facility Ground < 1Ω
Facility Leakage Current < 5A
Equipment Ground < 1Ω
Equipment Product ESD < 200 V
Work Table/ Shelf Ground < 10^9Ω
Work Table/ Shelf Product ESD < 200 V
Chiar/Cart Ground < 10^9Ω

* ESD control measurement is perfromed by QA,Maint on a monthly basis.

DI Water Control

Item Cotroll Limit Shut Down Limit
Bacteria < 5 colonies > 10 colonies
Resistance ≥ 17 ㏁ (Input)
≥ 16 ㏁ (Return)
< 16 ㏁ (Input)
< 14 ㏁ (Return)
TOC < 150 ppb > 200 ppb
Temperature 23±2˚C < 20˚C, or > 26˚C
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